Grinding and Polishing Method of Sapphire Wafers ...
2. The specific process of grinding and polishing of sapphire wafers. 1. Rough grinding: high hardness micro powder with particle size of 26-43um is used as abrasive, which is mixed with deionized water, dispersant and suspending agent to form coarse grinding fluid. The abrasive accounts for 15~30%. Then put them into the grinder for grinding. 2.